The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Oct. 18, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Paul B. Reuter, Austin, TX (US);
Murali Narasimhan, San Jose, CA (US);
Amulya L. Athayde, Palo Alto, CA (US);
Patrick Pannese, San Jose, CA (US);
Dean C. Hruzek, Cedar Park, TX (US);
Nir Merry, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In some embodiments, a side storage pod apparatus of an equipment front end module (EFEM) includes a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module. The EFEM further includes a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon. The EFEM further includes a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber and an exhaust port coupled to the plenum chamber.