The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 08, 2022

Filed:

Apr. 18, 2019
Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Haruka Takeuchi, Tokyo, JP;

Tomonori Ohashi, Tokyo, JP;

Ichiju Sato, Tokyo, JP;

Assignee:

EBARA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01F 7/06 (2006.01); H01F 7/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3266 (2013.01); H01F 7/064 (2013.01); H01F 7/20 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/334 (2013.01);
Abstract

An electromagnet control device includes a current value determining circuit configured to execute a second process for determining, based on a second function, a value of the current, in the case that the magnetic flux density is to be decreased from that in a first magnetization state, and a fourth process for expanding or reducing the second function by use of a first scaling ratio for transforming it to a fourth function, and determining, based on the fourth function obtained after above transformation, a value of the current, in the case that the magnetic flux density is to be decreased from that in a third magnetization state. The current value determining circuit is further configured to determine the first scaling ratio in such a manner that the second function fits measured data that are obtained in advance by decreasing the magnetic flux density from that in the third magnetization state.


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