The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Jun. 27, 2019
Applicant:
Mks Korea Ltd., Yongin-si, KR;
Inventors:
Changhee Lee, Daejon, KR;
Hanam Kim, Daejon, KR;
Jongmin Kim, Sejong, KR;
Jin Huh, Daejeon, KR;
Ka Sing Leung, Hong Kong, CN;
Assignee:
MKS Korea Ltd., Yongin-Si, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H03H 7/38 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01); H01J 37/32146 (2013.01); H01J 37/32165 (2013.01); H03H 7/38 (2013.01);
Abstract
A frequency tuning impedance matching method includes analyzing a start driving frequency, set by a user, and an RF output signal to vary a driving frequency. Specifically, a next frequency may be predicted using susceptance which is an imaginary part of measured admittance in an n-th pulse. Accordingly, impedance matching may be completed at high speed or an optimal frequency may be reached at high speed.