The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2022
Filed:
Oct. 01, 2020
Kla Corporation, Milpitas, CA (US);
Asaf Granot, Lotem, IL;
KLA Corporation, Milpitas, CA (US);
Abstract
A sample positioning system is disclosed. The system may include an imaging detector. The system may further include a controller communicatively coupled to the imaging detector and a sample stage, the controller including one or more processors configured to execute program instructions causing the one or more processors to: receive a current position of a field of view of the imaging detector; receive a target position of the sample; receive locations of reference features along a path; direct the sample stage to translate the sample along the path; direct the imaging detector to capture images of the reference features along the path; determine positioning errors of the sample stage along the path based on the images of the reference features; and adjust at least one of a velocity of the sample stage or the path to the target location based on the positioning errors during translation.