The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 08, 2022

Filed:

Mar. 09, 2018
Applicant:

Fujikin Incorporated, Osaka, JP;

Inventors:

Kenta Kondo, Osaka, JP;

Toshihide Yoshida, Osaka, JP;

Masahiko Takimoto, Osaka, JP;

Tsutomu Shinohara, Osaka, JP;

Tomohiro Nakata, Osaka, JP;

Takeru Miura, Osaka, JP;

Masahiko Nakazawa, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 31/00 (2006.01); F16K 31/126 (2006.01); F16K 31/122 (2006.01); F16K 31/02 (2006.01); F16K 31/124 (2006.01); F16K 7/17 (2006.01); C23C 16/455 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F16K 7/17 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); F16K 31/007 (2013.01); F16K 31/1266 (2013.01); H01L 21/67017 (2013.01); F16K 31/004 (2013.01); F16K 31/02 (2013.01); F16K 31/122 (2013.01); F16K 31/124 (2013.01);
Abstract

Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.


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