The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 08, 2022

Filed:

Jul. 03, 2018
Applicant:

Shin-etsu Chemical Co., Ltd., Tokyo, JP;

Inventors:

Shuichi Miyao, Niigata, JP;

Naruhiro Hoshino, Niigata, JP;

Tetsuro Okada, Niigata, JP;

Shigeyoshi Netsu, Niigata, JP;

Masahiko Ishida, Niigata, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 33/035 (2006.01); C30B 35/00 (2006.01); C23C 16/24 (2006.01); C30B 29/06 (2006.01); C23C 16/44 (2006.01); C30B 13/00 (2006.01);
U.S. Cl.
CPC ...
C30B 35/007 (2013.01); C01B 33/035 (2013.01); C23C 16/24 (2013.01); C23C 16/4418 (2013.01); C30B 29/06 (2013.01); C30B 13/00 (2013.01);
Abstract

To provide polycrystalline silicon suitable as a raw material for production of single-crystalline silicon. A D/L value is set within the range of less than 0.40 when multiple pairs of silicon cores are placed in a reaction furnace in production of a polycrystalline silicon rod having a diameter of 150 mm or more by deposition according to a chemical vapor deposition process and it is assumed that the average value of the final diameter of the polycrystalline silicon rod is defined as D (mm) and the mutual interval between the multiple pairs of silicon cores is defined as L (mm).


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