The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 01, 2022

Filed:

Sep. 12, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-Si, KR;

Inventors:

Jae Ryoung Lee, Asan-Si, KR;

Sang Hwan Kim, Cheonan-Si, KR;

Min Sung Kim, Asan-Si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B32B 43/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); B32B 43/006 (2013.01); H01L 21/67132 (2013.01); H01L 2221/68381 (2013.01); H01L 2221/68386 (2013.01); Y10S 156/93 (2013.01); Y10S 156/932 (2013.01); Y10S 156/941 (2013.01); Y10S 156/943 (2013.01); Y10T 156/1137 (2015.01); Y10T 156/1179 (2015.01); Y10T 156/1939 (2015.01); Y10T 156/1983 (2015.01);
Abstract

A chip ejecting apparatus includes a table configured to be provided with a dicing tape and a target chip adhered to an upper surface of the dicing tape, an ejector unit including a plurality of gas holes configured to inject a gas toward a lower surface of the dicing tape, and a control unit configured to separately control on/off operations of the plurality of gas holes and select an active gas hole group from the plurality of gas holes. The active gas hole group is selected to overlap the target chip, and is configured to inject the gas toward the dicing tape along a direction from a first edge of the target chip toward a second edge of the target chip opposite to the first edge of the target chip.


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