The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2022
Filed:
Mar. 24, 2017
Kokusai Electric Corporation, Tokyo, JP;
Kazuhide Asai, Toyama, JP;
Kazuyoshi Yamamoto, Toyama, JP;
Hidemoto Hayashihara, Toyama, JP;
Takayuki Kawagishi, Toyama, JP;
Kayoko Yashiki, Toyama, JP;
Yukio Miyata, Toyama, JP;
Hiroyuki Iwakura, Toyama, JP;
Masanori Okuno, Toyama, JP;
Kenichi Fujimoto, Toyama, JP;
Ryuichi Kaji, Toyama, JP;
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
Abstract
A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.