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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11237491 B1

PDFFull Text
Date of Patent:
Feb. 01, 2022

Filed:

Apr. 10, 2019

Reflective optical element for a radiation beam

Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Ramon Mark Hofstra, Beekbergen, NL;

Andrey Sergeevich Tychkov, Eindhoven, NL;

Francois Charles Dominique Deneuville, Eindhoven, NL;

Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;

Petrus Adrianus Theodorus Maria Ruijs, Berghem, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:

Sterne, Kessler, Goldstein & Fox P.L.L.C.

Primary Examiner:

Christina A Riddle

Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 27/14 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70891 (2013.01); G02B 27/141 (2013.01); G03F 7/702 (2013.01); G03F 7/70033 (2013.01); G03F 7/70266 (2013.01);
Abstract

A system comprises a reflective optical element with a reflective surface that is configured to reflect a radiation beam. The reflective optical element also has a body. The system includes a thermal conditioning mechanism operative to thermally induce a deformation of the body under control of a controller. By means of controllably deforming the body, the shape of the reflective surface can be adjusted in a controlled manner.

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Hofstra, Ramon. (2022). Reflective optical element for a radiation beam (U.S. Patent No. 11237491). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11237491

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