The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2022
Filed:
Dec. 07, 2018
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Jean-Michel Hartmann, Montbonnot-Saint-Martin, FR;
Mickael Brun, Eybens, FR;
Jean-Marc Fedeli, Saint-Egreve, FR;
Maryse Fournier, St Martin d'Uriage, FR;
Abstract
A method for producing a waveguide including a germanium-based core and a cladding is provided, the method including a step of 'low temperature' depositing of a shell after forming the core by engraving, such that the deposition temperature is less than 780° C., followed by a step of 'high temperature' depositing of a thick encapsulation layer. The shell and the encapsulation layer at least partially form the cladding of the waveguide. Optionally, a step of annealing under hydrogen at a “low temperature”, less than 750° C., precedes the deposition of the shell. These “low temperature” annealing and depositing steps advantageously make it possible to avoid a post-engraving alteration of the free surfaces of the core during the forming of the cladding which is less germanium-rich.