The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 25, 2022

Filed:

Dec. 18, 2019
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Masashi Sakai, Tokyo, JP;

Yoichiro Mitani, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); H02M 7/48 (2007.01); H02M 3/135 (2006.01); H01L 29/161 (2006.01); H01L 29/66 (2006.01); H01L 29/36 (2006.01); H01L 29/165 (2006.01); H02M 3/137 (2006.01); H02M 3/139 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1608 (2013.01); H01L 29/161 (2013.01); H01L 29/1604 (2013.01); H01L 29/165 (2013.01); H01L 29/36 (2013.01); H01L 29/66053 (2013.01); H02M 3/135 (2013.01); H02M 3/137 (2013.01); H02M 3/139 (2013.01); H02M 7/48 (2013.01);
Abstract

A SiC epitaxial wafer includes a SiC substrate and a SiC epitaxial layer disposed on the SiC substrate. The SiC epitaxial layer includes a high carrier concentration layer and two low carrier concentration layers having lower carrier concentration than the high carrier concentration layer, and being in contact with a top surface and a bottom surface of the high carrier concentration layer to sandwich the high carrier concentration layer. A difference in carrier concentration between the high carrier concentration layer and the low carrier concentration layers is 5×10/cmor more and 2×10/cmor less.


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