The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2022
Filed:
Oct. 21, 2020
Applicant:
Ict Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh, Heimstetten, DE;
Inventor:
Dieter Winkler, Munich, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/02 (2006.01); H01J 37/073 (2006.01);
U.S. Cl.
CPC ...
H01J 3/021 (2013.01); H01J 37/073 (2013.01); H01J 2203/026 (2013.01); H01J 2229/481 (2013.01); H01J 2229/4824 (2013.01); H01J 2229/4834 (2013.01);
Abstract
A charged particle gun for a charged particle beam device is described. The charged particle gun includes a gun housing; an emitter provided in the gun housing, the emitter being configured to emit a charged particle beam along an axis; an emitter power supply connected to the emitter; a trapping electrode provided in the gun housing, the trapping electrode at least partially surrounding the axis; a trapping power supply connected to the trapping electrode; and a shielding element shielding an electrostatic field of the trapping electrode from the axis during operation of the gun housing.