The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2022
Filed:
Apr. 03, 2019
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Youji Kawasaki, Utsunomiya, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01);
Abstract
An imprint device which minimizes the occurrence of pattern defects. The imprint device for forming a pattern made of an imprint material on a shot region formed on a substrate using a mold includes: a supply unit configured to discharge the imprint material through a discharge port and supply the imprint material onto the substrate, a substrate stage configured to hold and move the substrate, and a control unit configured to control the substrate stage. The control unit moves the substrate stage so that a shot region having the pattern formed thereon avoids a portion immediately below the discharge port.