The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 25, 2022

Filed:

Jan. 17, 2018
Applicants:

Jeol Ltd., Tokyo, JP;

National Institute of Advanced Industrial Science and Technology, Tokyo, JP;

Inventors:

Satoru Akai, Tokyo, JP;

Ayumi Morioka, Tokyo, JP;

Nobuo Handa, Tokyo, JP;

Akira Kurokawa, Tsukuba, JP;

Kazuhiro Kumagai, Tsukuba, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 1/31 (2006.01); G01N 35/00 (2006.01); G01N 1/40 (2006.01); G01N 1/28 (2006.01); G01N 1/42 (2006.01); B01D 1/24 (2006.01); G01N 1/00 (2006.01); B65B 3/04 (2006.01); B65B 1/04 (2006.01); G01N 35/10 (2006.01); G01N 33/487 (2006.01); B01L 3/00 (2006.01); G01N 1/20 (2006.01); G01N 1/30 (2006.01);
U.S. Cl.
CPC ...
G01N 1/31 (2013.01); G01N 1/28 (2013.01); G01N 1/4022 (2013.01); G01N 1/42 (2013.01); G01N 35/00029 (2013.01); B01D 1/24 (2013.01); B01L 3/00 (2013.01); B65B 1/04 (2013.01); B65B 3/04 (2013.01); G01N 1/00 (2013.01); G01N 33/487 (2013.01); G01N 35/00 (2013.01); G01N 35/00732 (2013.01); G01N 35/10 (2013.01); G01N 2001/2057 (2013.01); G01N 2001/302 (2013.01); G01N 2001/4027 (2013.01); G01N 2001/4033 (2013.01);
Abstract

A lower-side structure forms a specimen chamber in which a specimen base is provided. An upper-side structure forms a nozzle chamber above the specimen chamber. The specimen chamber and the nozzle chamber are separated by a gate valve. In the nozzle chamber, at least a tip opening of a nozzle that ejects a specimen is present. A control device maintains a relationship of gas pressures such that a gas pressure in the specimen chamber is higher than a gas pressure in the nozzle chamber when the lower-side structure and the upper-side structure are in communication with each other.


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