The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2022
Filed:
Sep. 25, 2019
Tokyo Electron Limited, Tokyo, JP;
Jun Young Chung, Hwaseong-si, KR;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A dry air generation apparatus includes a first heat exchanger, a second heat exchanger, a switching valve, and a controller. The first heat exchanger and the second heat exchanger are provided in the air flow path, and the moisture contained in the air is removed by cooling the air which flows through the flow path to 0° C. or lower. The switching valve switches the direction of the air flowing through the first heat exchanger and the second heat exchanger. The controller controls the first heat exchanger, the second heat exchanger, and the switching valve. The first heat exchanger and the second heat exchanger are connected in series in the air flow path.