The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 18, 2022

Filed:

Oct. 24, 2019
Applicants:

SK Hynix Inc., Icheon-si, KR;

Seoul National University R&db Foundation, Seoul, KR;

Inventors:

Yoo-Hyun Noh, Icheon-si, KR;

Jong-Ho Lee, Seoul, KR;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 27/24 (2006.01); G11C 5/06 (2006.01); H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 27/2454 (2013.01); G11C 5/063 (2013.01); H01L 27/2481 (2013.01); H01L 45/1206 (2013.01); H01L 45/16 (2013.01);
Abstract

A nonvolatile memory device includes a gate line extending in a first horizontal direction; a gate electrode of a pillar shape extending in a vertical direction from the gate line; a plurality of bit lines and a plurality of source lines extending in parallel in a second horizontal direction perpendicular to the first horizontal direction, the plurality of bit lines and the plurality of source lines being stacked in the vertical direction; and a plurality of cell transistors vertically stacked to surround an outer side surface of the gate electrode between the plurality of bit lines and the plurality of source lines. Each of the cell transistors includes a gate dielectric layer which surrounds the outer side surface of the gate electrode and a channel layer which surrounds an outer side surface of the gate dielectric layer.


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