The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2022
Filed:
Oct. 12, 2017
Applicant:
Fujikin Incorporated, Osaka, JP;
Inventors:
Kaoru Hirata, Osaka, JP;
Katsuyuki Sugita, Osaka, JP;
Takahiro Imai, Osaka, JP;
Shinya Ogawa, Osaka, JP;
Kouji Nishino, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Assignee:
FUJIKIN INCORPORATED, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 7/06 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0635 (2013.01); G05D 7/0652 (2013.01); H01L 21/67017 (2013.01);
Abstract
A fluid control device includes a main body block including a first flow passage, and a second flow passage, a first and second fluid control units installed on an installation surface of the main body block. The first and second flow passages include a first portion extending along a first direction and a second flow passage portion orthogonal to the first direction. The second portion is formed of a hole extending from a side surface of the main body block and a sealing member.