The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2022
Filed:
Apr. 29, 2020
Afore Oy, Lieto, FI;
Bluefors Cryogenics Oy, Helsinki, FI;
Aki Junes, Turku, FI;
Ari Kuukkala, Turku, FI;
Timo Salminen, Turku, FI;
Vesa Henttonen, Turku, FI;
Matti Manninen, Espoo, FI;
David Gunnarsson, Helsinki, FI;
Leif Roschier, Vantaa, FI;
Afore Oy, Lieto, FI;
Bluefors Cryogenics Oy, Helsinki, FI;
Abstract
A testing device () is for electrically testing integrated circuits on a wafer (). The testing device () includes a vacuum chamber (), a chuck () for holding the wafer (), a probe card () for electrically contacting the integrated circuits, and a radiation shield () arranged inside the vacuum chamber () and enclosing the chuck () and the probe card (). In the testing device (), the vacuum chamber () is provided with a gate valve (), the radiation shield () is provided with a hatch (), and the testing device () includes a wafer loading assembly () for loading the wafer () onto the chuck () through the gate valve () and the hatch ().