The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 18, 2022

Filed:

Oct. 19, 2016
Applicant:

Sicpa Holding SA, Prilly, CH;

Inventors:

Paolo Schina, Turin, IT;

Silvia Baldi, Samone, IT;

Irma Disegna, Ivrea, IT;

Miriam Perini, Ivrea, IT;

Assignee:

SICPA HOLDING SA, Prilly, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/16 (2006.01); H01L 21/311 (2006.01); B41J 2/14 (2006.01); H01L 27/092 (2006.01);
U.S. Cl.
CPC ...
B41J 2/1626 (2013.01); B41J 2/14088 (2013.01); B41J 2/14129 (2013.01); B41J 2/1601 (2013.01); H01L 21/31111 (2013.01); H01L 27/092 (2013.01); B41J 2202/13 (2013.01);
Abstract

The present invention provides a method for forming a thermal inkjet printhead, comprising at least the following steps: providing a semiconductor wafer including an integrated electronic circuit and a section for forming a thermal actuator element, the integrated circuit comprising at least: a thermal insulating layer formed over a substrate; and a first metal layer formed over the thermal insulating layer; wherein the first metal layer extends into the section for forming the thermal actuator element; and etching a section for forming a thermal actuator element to the first metal layer such that the first metal layer is acting as an etch stop layer. Further there is provided a thermal inkjet printhead formed by a method of the present invention and a semiconductor wafer for forming the thermal inkjet printheads by a method of the present invention.


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