The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 11, 2022

Filed:

Aug. 19, 2019
Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Petrus Wilhelmus Smorenburg, Veldhoven, NL;

Gerrit Jacobus Hendrik Brussaard, Boxtel, NL;

David O Dwyer, Eindhoven, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/109 (2006.01); G01N 21/956 (2006.01); G03F 7/20 (2006.01); G02F 1/35 (2006.01);
U.S. Cl.
CPC ...
H01S 3/109 (2013.01); G01N 21/956 (2013.01); G03F 7/202 (2013.01); G02F 1/354 (2021.01);
Abstract

Methods and corresponding apparatus operable to cause an interaction between a drive radiation beam and a medium for generation of emitted radiation by high harmonic generation, the arrangement comprising: an interaction region positioned at an interaction plane and configured to receive the medium; a beam block positioned upstream of the interaction plane at a beam block plane and configured to partially block the drive radiation beam; a beam shaper positioned upstream of the beam block plane at an object plane and configured to control a spatial distribution of the drive radiation beam; and at least one lens positioned upstream of the interaction plane and downstream of the beam block plane, wherein the lens being positioned such that an image of the spatial distribution of the drive radiation beam is formed at the interaction plane.


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Smorenburg, Petrus. (2022). High harmonic generation radiation source (U.S. Patent No. 11223181). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11223181

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