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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11222822 B1

PDFFull Text
Date of Patent:
Jan. 11, 2022

Filed:

Jan. 09, 2020

Workpiece cutting method

Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Naoko Yamamoto, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer, Burns & Crain, Ltd.

Primary Examiner:

Brian Turner

Int. Cl.
CPC ...
G01N 21/95 (2006.01); G01T 7/04 (2006.01); G06T 7/00 (2017.01); G01N 21/01 (2006.01); H01L 21/67 (2006.01); H01L 21/304 (2006.01); H01L 21/82 (2006.01); H01L 21/687 (2006.01); H01L 21/78 (2006.01); H01L 21/683 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); H01L 21/304 (2013.01); H01L 21/67092 (2013.01); H01L 21/6836 (2013.01); H01L 22/12 (2013.01); H01L 2221/68327 (2013.01);
Abstract

A workpiece cutting method includes attaching a tape to a lower surface of the workpiece, holding the lower surface through the tape on a holding table including a holding plate, at least a part of a holding surface of the holding plate being an imaging area formed of a material transparent to visible light, cutting the workpiece held on the holding table to divide the workpiece, thereby forming a dividing groove, and imaging at least a part of the dividing groove from a upper surface side of the workpiece by using an upper camera portion located above the holding plate, thereby obtaining an upper image, and also imaging the above part of the dividing groove from the lower surface side of the workpiece through the imaging area of the holding plate and the tape by using a lower camera portion located below the holding plate, thereby obtaining a lower image.

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