The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2022
Filed:
Dec. 07, 2017
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Young Hoon Kim, Chungcheongnam, KR;
Yong Gyu Han, Seoul, KR;
Dae Youn Kim, Daejeon, KR;
Hyun Soo Jang, Daejeon, KR;
Jeong Ho Lee, Seoul, KR;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32495 (2013.01); C23C 16/402 (2013.01); C23C 16/4404 (2013.01); C23C 16/4412 (2013.01); C23C 16/45502 (2013.01); C23C 16/45542 (2013.01); C23C 16/45548 (2013.01); C23C 16/45565 (2013.01); C23C 16/52 (2013.01); H01J 37/32082 (2013.01); H01J 37/32449 (2013.01); H01J 37/32467 (2013.01); H01J 37/32477 (2013.01);
Abstract
A substrate processing apparatus includes a partition comprising at least one through-hole, a conduit arranged in the partition through the through-hole, a gas supply unit connected to the conduit, and a low dielectric material provided between a side wall of the through-hole and the conduit.