The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2022
Filed:
Feb. 03, 2017
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., Munich, DE;
Ctf Solar Gmbh, Dresden, DE;
Henry Morgner, Dresden, DE;
Christoph Metzner, Dresden, DE;
Daniel Hirsch, Dresden, DE;
Olaf Zywitzki, Dresden, DE;
Ludwig Decker, Dresden, DE;
Torsten Werner, Dresden, DE;
Bastian Siepchen, Dresden, DE;
Bettina Späth, Dresden, DE;
Krishnakumar Velappan, Dresden, DE;
Christian Kraft, Dresden, DE;
Christian Drost, Dresden, DE;
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V., Munich, DE;
CTF SOLAR GMBH, Dresden, DE;
Abstract
A method for depositing a CdTe layer on a substrate in a vacuum chamber by means of physical gas phase deposition is provided. The substrate is heated to a coating temperature before the deposition process and then guided past a vessel in which CdTe is converted into a vapour state, a gaseous component with an increased pressure (compared to the vacuum in the vacuum chamber) flowing through at least one inlet, against the substrate surface to be coated, such that the gaseous component is adsorbed on the substrate surface to be coated before the substrate is guided past the at least one vessel.