The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 04, 2022

Filed:

Feb. 03, 2017
Applicants:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., Munich, DE;

Ctf Solar Gmbh, Dresden, DE;

Inventors:

Henry Morgner, Dresden, DE;

Christoph Metzner, Dresden, DE;

Daniel Hirsch, Dresden, DE;

Olaf Zywitzki, Dresden, DE;

Ludwig Decker, Dresden, DE;

Torsten Werner, Dresden, DE;

Bastian Siepchen, Dresden, DE;

Bettina Späth, Dresden, DE;

Krishnakumar Velappan, Dresden, DE;

Christian Kraft, Dresden, DE;

Christian Drost, Dresden, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/18 (2006.01); C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 14/56 (2006.01); C23C 14/00 (2006.01); C23C 16/30 (2006.01); H01L 31/0445 (2014.01); H01L 27/146 (2006.01); H01L 31/0296 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1828 (2013.01); C23C 14/0021 (2013.01); C23C 14/02 (2013.01); C23C 14/0629 (2013.01); C23C 14/562 (2013.01); C23C 16/306 (2013.01); H01L 27/14696 (2013.01); H01L 31/0296 (2013.01); H01L 31/0445 (2014.12);
Abstract

A method for depositing a CdTe layer on a substrate in a vacuum chamber by means of physical gas phase deposition is provided. The substrate is heated to a coating temperature before the deposition process and then guided past a vessel in which CdTe is converted into a vapour state, a gaseous component with an increased pressure (compared to the vacuum in the vacuum chamber) flowing through at least one inlet, against the substrate surface to be coated, such that the gaseous component is adsorbed on the substrate surface to be coated before the substrate is guided past the at least one vessel.


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