The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2022
Filed:
Aug. 31, 2020
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Sang-Young Kim, Cheonan-si, KR;
Kyung-Soo Rho, Suwon-si, KR;
Ho-Jeong Moon, Daejeon, KR;
Hyuck Shin, Bucheon-si, KR;
Sun-Nyeong Jung, Asan-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G21K 1/10 (2006.01); G01N 23/04 (2018.01); H01L 23/31 (2006.01); H01L 23/00 (2006.01); H01L 25/065 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G01N 23/04 (2013.01); G21K 1/10 (2013.01); H01L 23/3114 (2013.01); H01L 24/48 (2013.01); H01L 25/0657 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48153 (2013.01); H01L 2224/48227 (2013.01); H01L 2224/8592 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/15184 (2013.01);
Abstract
An X-ray source is disposed and a detector is disposed adjacent to the X-ray source. A test specimen holder is disposed between the X-ray source and the detector. A filter is disposed between the X-ray source and the test specimen holder. The filter has a plate-shaped semiconductor, a granular semiconductor, or a combination thereof.