The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2022
Filed:
Sep. 23, 2020
Kla Corporation, Milpitas, CA (US);
Sergei Belousov, Milpitas, CA (US);
Andrey Knizhnik, Milpitas, CA (US);
Inna M. Iskandarova, Milpitas, CA (US);
Boris Potapkin, Milpitas, CA (US);
Katerina Ioakeimidi, San Francisco, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Frances Hill, Sunnyvale, CA (US);
Gary V. Lopez Lopez, Sunnyvale, CA (US);
Miguel Gonzalez, Livermore, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A photocathode emitter includes a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure array is configured to operate at a wavelength from 193 nm to 430 nm. The plasmonic structure array can be made of aluminum. An electron beam can be generated from a light beam directed at the plasmonic structure array of the photocathode emitter.