The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2022
Filed:
Jan. 29, 2015
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventor:
Norbert Bowering, Bielefeld, DE;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 1/14 (2015.01); G02B 5/08 (2006.01); G21K 1/06 (2006.01);
U.S. Cl.
CPC ...
G02B 1/14 (2015.01); G02B 5/0816 (2013.01); G02B 5/0875 (2013.01); G02B 5/0891 (2013.01); G21K 1/062 (2013.01);
Abstract
A multilayer mirror having a cap with a multilayer structure including a top layer and a series of bilayers each having an absorber layer and a spacer layer, where the materials for the top layer, absorber layers, and spacer layers are chosen to resist blistering.