The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 04, 2022

Filed:

Sep. 20, 2018
Applicant:

Sony Semiconductor Solutions Corporation, Kanagawa, JP;

Inventors:

Katsuji Kimura, Kanagawa, JP;

Hiroyuki Yamanaka, Kumamoto, JP;

Yuji Furukawa, Kumamoto, JP;

Kohei Harada, Kumamoto, JP;

Hironori Takahashi, Kumamoto, JP;

Hiroyuki Goto, Nagasaki, JP;

Heiichiro Ryu, Kumamoto, JP;

Katsuaki Tatebayashi, Kumamoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M 11/02 (2006.01); G01N 21/88 (2006.01); G01R 31/28 (2006.01); G01R 31/26 (2020.01); G01R 31/311 (2006.01);
U.S. Cl.
CPC ...
G01M 11/0257 (2013.01); G01M 11/025 (2013.01); G01M 11/0207 (2013.01); G01N 21/8806 (2013.01); G01R 31/2641 (2013.01); G01R 31/2829 (2013.01); G01R 31/311 (2013.01);
Abstract

The present disclosure relates to an inspection apparatus and an inspection method that enable inspection of the performance of an image pickup element. Generation of collimated light and transmission of part of the collimated light through a transmission filter having a light-blocking face provided with circular holes arranged regularly, causes conversion to rays of columnar collimated light arranged regularly. An image including the rays of columnar collimated light arranged regularly, is captured by an image pickup element being inspected. Then, acquisition of the difference between the image captured by the image pickup element being inspected and an ideal image captured by an ideal image pickup element and comparison between the difference and a threshold, result in inspection of the performance of the image pickup element being inspected.


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