The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 28, 2021

Filed:

May. 03, 2019
Applicant:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Inventors:

Sheng Fen Chiu, Shanghai, CN;

Fansheng Kung, Shanghai, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/11521 (2017.01); H01L 21/28 (2006.01); H01L 29/66 (2006.01); H01L 29/788 (2006.01); H01L 21/768 (2006.01); H01L 21/3213 (2006.01); H01L 29/49 (2006.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11521 (2013.01); H01L 21/28247 (2013.01); H01L 21/76897 (2013.01); H01L 29/40114 (2019.08); H01L 29/6656 (2013.01); H01L 29/66825 (2013.01); H01L 29/7881 (2013.01); H01L 21/26513 (2013.01); H01L 21/32134 (2013.01); H01L 21/32137 (2013.01); H01L 29/4916 (2013.01);
Abstract

Memory devices are provided. A memory device includes one or more adjacent memory cells on a substrate. A memory cell includes first dielectric layer on the substrate, floating gate, second dielectric layer, control gate layer, and first mask layer. The control gate layer has a first portion and a second portion thereon. A silicide layer is in the control gate layer and covers at least a sidewall of the second portion of the control gate layer. In a direction parallel to a surface of the substrate, the silicide layer has a size smaller than the first portion of the control gate layer or a size of the floating gate layer. A fourth dielectric layer is on the substrate and on the memory cell. The fourth dielectric layer contains an opening exposing a portion of the substrate between adjacent memory cells. A conductive structure is in the opening.


Find Patent Forward Citations

Chiu, Sheng. (2021). Memory device (U.S. Patent No. 11211389). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11211389

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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