The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2021
Filed:
Feb. 01, 2019
Nuflare Technology, Inc., Yokohama, JP;
Masaya Takeda, Yokohama, JP;
NUFLARE TECHNOLOGY, INC., Yokohama, JP;
Abstract
A method according to an embodiment includes: mounting a reference-specimen of a same material as that of a specimen on a support member and creating a map indicating a distortion in a gravity direction of the reference-specimen; mounting the specimen on the support member and irradiating light to the specimen; correcting a linear component of a distortion in a gravity direction of the specimen between a first point on the specimen and a second point located in the first scanning direction on the specimen on a basis of a first difference in the gravity direction between the first and second points in the map, and correcting a secondary component of the distortion in the gravity direction of the specimen using a feedback circuit, when the pattern is imaged; and performing a defect inspection using an image of the pattern.