The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2021
Filed:
Jul. 08, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Andrew Paul Harbert, Austin, TX (US);
Michael C Kuchar, Georgetown, TX (US);
Nicholas Michael Bergantz, Sunnyvale, CA (US);
Leon Volfovski, Mountain View, CA (US);
Sivakumar Ramalingam, Bangalore, IN;
Karuppasamy Muthukamatchi, Madurai, IN;
Douglas R McAllister, San Ramon, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.