The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2021
Filed:
May. 19, 2017
Applicant:
Mitsui Chemicals, Inc., Tokyo, JP;
Inventors:
Assignee:
MITSUI CHEMICALS, INC., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); H01L 21/027 (2006.01); H01L 21/3065 (2006.01); H01L 21/02 (2006.01); C09D 201/00 (2006.01); G03F 7/16 (2006.01); C09D 7/40 (2018.01); G03F 7/11 (2006.01); G03F 7/09 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0755 (2013.01); C09D 201/00 (2013.01); G03F 7/0752 (2013.01); G03F 7/0757 (2013.01); G03F 7/16 (2013.01); H01L 21/027 (2013.01); H01L 21/02216 (2013.01); H01L 21/02282 (2013.01); H01L 21/3065 (2013.01); C09D 7/40 (2018.01); G03F 7/094 (2013.01); G03F 7/11 (2013.01);
Abstract
A composition for forming a metal-containing film, the composition including: a compound (A) which is at least one selected from the group consisting of: a compound (a1) containing a cationic functional group containing at least one of a primary nitrogen atom or a secondary nitrogen atom, and a compound (a2) which is a compound other than the compound (a1) and which contains a nitrogen atom; and a compound (B) which is at least one selected from the group consisting of: a compound (b1) containing a carboxy group and at least one of a germanium atom, a tin atom, a selenium atom or a zirconium atom, and an ester of the compound (b1).