The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2021
Filed:
Sep. 30, 2016
Applicant:
Hansol Chemical Co., Ltd., Seoul, KR;
Inventors:
Jung Woo Park, Seoul, KR;
Donghak Jang, Jeonju-si, KR;
Yeong Eun Kim, Changwon-si, KR;
Hyo-Suk Kim, Jeonju-si, KR;
Kwang Soo Lim, Jeonju-si, KR;
Assignee:
HANSOL CHEMICAL CO., LTD., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C01G 49/00 (2006.01); C23C 16/40 (2006.01); C07F 15/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C01G 49/0018 (2013.01); C07F 15/025 (2013.01); C23C 16/409 (2013.01); C23C 16/45527 (2013.01); C01P 2002/34 (2013.01);
Abstract
An organometallic compound, which enables thin-film deposition through vapor deposition, and particularly to a Co or Fe precursor, which is suitable for use in atomic layer deposition or chemical vapor deposition, and a method of preparing the same.