The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2021
Filed:
Dec. 06, 2019
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
David Kuiper, Brookfield, CT (US);
Manish Khandelwal, Danbury, CT (US);
Thomas M. Cameron, Newtown, CT (US);
Thomas H. Baum, New Fairfield, CT (US);
John Cleary, Monroe, CT (US);
Assignee:
Entegris, Inc., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 7/08 (2006.01);
U.S. Cl.
CPC ...
C07F 7/0827 (2013.01);
Abstract
Provided is a process for preparing certain silane precursor compounds, e.g., triiodosilane from trichlorosilane utilizing lithium iodide in powder form and catalyzed by tertiary amines. The process provides triiodosilane in high yields and high purity. Triiodosilane is a precursor compound useful in the atomic layer deposition of silicon onto various microelectronic device structures.