The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2021
Filed:
Aug. 28, 2019
Applicant:
Nhk Spring Co., Ltd., Yokohama, JP;
Inventors:
Assignee:
NHK SPRING CO., LTD., Yokohama, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); C23C 14/50 (2013.01); C23C 14/541 (2013.01); C23C 16/458 (2013.01); C23C 16/4583 (2013.01); C23C 16/4586 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H01L 21/68735 (2013.01); H01L 21/68785 (2013.01); H01L 21/68792 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/3341 (2013.01);
Abstract
A substrate supporting unit is provided. The substrate supporting unit possesses a shaft, a first heater, and a stage. The first heater is located in the shaft and is configured to heat an upper portion of the shaft. The stage is located over the shaft and includes a first plate, a second plate over the first plate, and a second heater between the first plate and the second plate.