The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2021
Filed:
Dec. 19, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
David Fenwick, Los Altos, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/44 (2006.01); C23C 16/40 (2006.01); C23C 28/04 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4404 (2013.01); C23C 16/40 (2013.01); C23C 16/403 (2013.01); C23C 16/405 (2013.01); C23C 16/4408 (2013.01); C23C 16/45529 (2013.01); C23C 16/45531 (2013.01); C23C 28/042 (2013.01);
Abstract
A multi-component coating composition for a surface of a chamber component comprising at least one first film layer of a yttrium oxide coated onto the surface of the chamber component using an atomic layer deposition process and at least one second film layer of zirconium oxide coated onto the surface of the chamber component using an atomic layer deposition process, wherein the multi-component coating comprises YZrO.