The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 07, 2021

Filed:

Jul. 01, 2019
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Satoru Kobayashi, Santa Clara, CA (US);

Hideo Sugai, Aichi, JP;

Toan Tran, San Jose, CA (US);

Soonam Park, Sunnyvale, CA (US);

Dmitry Lubomirsky, Cupertino, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32293 (2013.01); H01J 37/32192 (2013.01); H01J 37/32211 (2013.01); H01J 37/32229 (2013.01); H01J 37/32935 (2013.01); H01J 2237/334 (2013.01);
Abstract

A rotating microwave is established for any resonant mode TEor TMof a cavity, where the user is free to choose the values of the mode indices m, n and l. The fast rotation, the rotation frequency of which is equal to an operational microwave frequency, is accomplished by setting the temporal phase difference ΔØ and the azimuthal angle Δθ between two microwave input ports P and Q as functions of m, n and l. The slow rotation of frequency Ω(typically 1-1000 Hz), is established by transforming dual field inputs α cos Ωt and ±α sin Ωt in the orthogonal input system into an oblique system defined by the angle Δθ between two microwave ports P and Q.


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