The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2021
Filed:
Nov. 17, 2020
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Heiko Feldmann, Aalen, DE;
Valentin Bolsinger, Aalen, DE;
William Peter Van Drent, Veldhoven, NL;
Jozef Petrus Henricus Benschop, Veldhoven, NL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical diffraction component is configured to suppress at least one target wavelength by destructive interference. The optical diffraction component includes at least three diffraction structure levels that are assignable to at least two diffraction structure groups. A first of the diffraction structure groups is configured to suppress a first target wavelength λ. A second of the diffraction structure groups is configured to suppress a second target wavelength λ, where (λ−λ)/(λ+λ)<20%. A topography of the diffraction structure levels can be described as a superimposition of two binary diffraction structure groups. Boundary regions between adjacent surface sections of each of the binary diffraction structure groups have a linear course and are superimposed on one another at most along sections of the linear course.