The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2021
Filed:
Sep. 22, 2015
Applicant:
Nissan Chemical Industries, Ltd., Tokyo, JP;
Inventor:
Phillipp Lorenz, Munich, DE;
Assignee:
NISSAN CHEMICAL INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 16/458 (2006.01); H01L 21/683 (2006.01); B01J 19/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4586 (2013.01); B01J 19/0046 (2013.01); H01L 21/687 (2013.01); H01L 21/6835 (2013.01); H01L 21/6875 (2013.01); H01L 21/68728 (2013.01); H01L 21/68735 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68318 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68381 (2013.01);
Abstract
A wafer/support arrangement, including a wafer, a support system, which includes a support and an elastomer layer, and a connecting layer, wherein the connecting layer is a sol-gel layer. The invention further relates to a coated wafer for a wafer/support arrangement according to the invention, wherein a sol-gel layer is used as a connecting layer for a corresponding wafer/support assembly, and to a method for processing the back side of a wafer.
Lorenz, Phillipp. (2021). Wafer/support arrangement, method for producing the arrangement, and use of the arrangement in the processing of the wafer (U.S. Patent No. 11193208). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11193208
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile