The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2021
Filed:
Aug. 29, 2018
Applicant:
Toshiba Memory Corporation, Tokyo, JP;
Inventors:
Kei Kobayashi, Yokohama Kanagawa, JP;
Anupam Mitra, Yokohama Kanagawa, JP;
Seiji Morita, Tokyo, JP;
Hirokazu Kato, Kariya Aichi, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 33/42 (2006.01); B29C 35/08 (2006.01); G03F 7/00 (2006.01); B29C 37/00 (2006.01); H01L 21/027 (2006.01); B29C 43/02 (2006.01); B29C 43/38 (2006.01);
U.S. Cl.
CPC ...
B29C 33/424 (2013.01); B29C 35/0888 (2013.01); B29C 37/0053 (2013.01); B29C 43/021 (2013.01); B29C 43/38 (2013.01); G03F 7/0002 (2013.01); H01L 21/027 (2013.01); B29C 2035/0827 (2013.01); B29C 2043/025 (2013.01);
Abstract
According to one embodiment, a template for imprint patterning processes comprises a template substrate having a first surface and a pedestal on the first surface of the template substrate, the pedestal having a second surface spaced from the first surface in a first direction perpendicular to the first surface. A pattern is disposed on the second surface. The pedestal has a sidewall between the first surface and the second surface that is at an angle of less than 90° to the second surface.