The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Feb. 14, 2019
Applicant:
Ulvac, Inc., Chigasaki, JP;
Inventors:
Assignee:
ULVAC, INC., Chigasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); H01L 43/10 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); C23C 14/18 (2013.01); C23C 14/34 (2013.01); C23C 14/5806 (2013.01); H01L 43/10 (2013.01);
Abstract
A method includes forming an amorphous magnetic film on a film formation subject by sputtering a target that includes any one selected from a group consisting of MnSn, MnGe, and (MnFe)Ge as a main component and crystalizing the amorphous magnetic film by heating the amorphous magnetic film. The crystalizing includes heating the amorphous magnetic film to a temperature that is greater than or equal to 225° C. and less than or equal to 400° C.