The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Apr. 05, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Kallol Bera, Fremont, CA (US);
Shahid Rauf, Pleasanton, CA (US);
James Carducci, Sunnyvale, CA (US);
Vladimir Knyazik, Santa Clara, CA (US);
Anantha K. Subramani, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 31/32 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01H 1/46 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); H01J 37/3244 (2013.01);
Abstract
Gas distribution modules comprising a housing with an upper plenum and a lower plenum are described. One of the upper plenum and lower plenum is in fluid communication with an inlet and the other is in fluid communication with an outlet. A plurality of upper passages connects the upper plenum to the bottom of the housing to allow a flow of gas to pass through and be isolated from the first plenum.