The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Jul. 17, 2017
Applied Materials, Inc., Santa Clara, CA (US);
Irena H. Wysok, San Jose, CA (US);
Kirankumar Savandaiah, Bangalore, IN;
Anthony Chih-Tung Chan, Sunnyvale, CA (US);
Jiao Song, Singapore, SG;
Prashant Prabhu, Karwar, IN;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of a magnetron assembly and a processing system incorporating same are provided herein. In some embodiments, a magnetron assembly includes a body extending along a central axis of the magnetron assembly; a coolant feed structure extending through the body along the central axis to provide a coolant along the central axis to an area beneath the coolant feed structure; and a rotatable magnet assembly coupled to a bottom of the body and having a plurality of magnets.