The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Feb. 07, 2019
Canon Kabushiki Kaisha, Tokyo, JP;
Youji Kawasaki, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a planarization apparatus which planarizes a composition on a substrate by using a mold, the apparatus including a processing unit configured to, for each of a plurality of substrates, perform planarization processing for, by bringing a planar portion of the mold into contact with the composition on the substrate and making the planar portion conform to a surface shape of the substrate, planarizing the composition, and a driving unit configured to, whenever the planarization processing is performed a predetermined number of times, relatively drive the mold and a processing target substrate among the plurality of substrate so that a relative positional relationship between the processing target substrate and the planar portion changes.