The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Aug. 02, 2019
Device and method for simultaneously inspecting defects of surface and subsurface of optical element
Zhejiang University, Zhejiang, CN;
Anyu Sun, Zhejiang, CN;
Zhihong Li, Zhejiang, CN;
Bingfeng Ju, Zhejiang, CN;
Chuanyong Wang, Zhejiang, CN;
Xiaoyu Yang, Zhejiang, CN;
Zeqing Sun, Zhejiang, CN;
Huilin Du, Zhejiang, CN;
ZHEJIANG UNIVERSITY, Zhejiang, CN;
Abstract
A device and a method for simultaneously inspecting defects of a surface and a subsurface of an optical element are provided. Combined with laser-induced ultrasound and laser scattering inspection technologies, through generating acoustic sound waves on the surface and the subsurface of the optical element to be tested by lasers, a static light scattering effect of subsurface defects under modulation of the acoustic sound wave is observed and analyzed; through analyzing amplitude and phase changes of scattered light intensity and reflected light intensity, inspection for the defects of the surface and the subsurface of the optical element is realized. The present invention can be applied in quality inspection of precise optical elements, especially in finished product inspection of ultra-precise optical elements having strict requirements on the subsurface defects.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile