The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Jan. 18, 2019
Applicant:
Sumco Corporation, Tokyo, JP;
Inventors:
Sayaka Makise, Saga, JP;
Shuichi Samata, Saga, JP;
Noritomo Mitsugi, Saga, JP;
Sumio Miyazaki, Saga, JP;
Assignee:
SUMCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01N 27/20 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); G01N 27/20 (2013.01); H01L 21/02532 (2013.01);
Abstract
Provided is a method of evaluating a silicon layer, including forming an oxide film on a surface of a silicon layer, performing a charging treatment of charging a surface of the formed oxide film to a negative charge, and measuring a resistivity of the silicon layer that has been subjected to the charging treatment by a van der Pauw method.