The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 23, 2021

Filed:

Apr. 26, 2019
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Sheng-chun Yang, Hsinchu, TW;

Yi-Ming Lin, Tainan, TW;

Chao-Hung Wan, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05B 1/00 (2006.01); C23C 16/455 (2006.01); C23C 16/44 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); B05B 1/14 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67196 (2013.01); B05B 1/005 (2013.01); B05B 1/14 (2013.01); C23C 16/4402 (2013.01); C23C 16/4408 (2013.01); C23C 16/45559 (2013.01); C23C 16/45561 (2013.01); H01L 21/67017 (2013.01); G05D 7/0676 (2013.01); H01L 21/67742 (2013.01);
Abstract

A diffuser for diffusing a gas includes a base portion and a head portion fluidly coupled to the base portion. The head portion includes a diffuser element configured to diffuse a first fraction of the gas through a circumference of the diffuser element and a second fraction of the gas through an end surface of the diffuser element. The head portion further includes a connecting structure having a first connecting portion configured to receive a portion of the diffuser element therein and a second connecting portion protruding outwardly from the first connecting portion and configured to couple to the base portion.


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