The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Aug. 14, 2018
Applicant:
Nokomis, Inc., Charleroi, PA (US);
Inventors:
Robert Michael Nichol, Washington, PA (US);
Walter John Keller, III, Bridgeville, PA (US);
Todd Eric Chornenky, Carmichaels, PA (US);
Assignee:
NOKOMIS, INC., Charleroi, PA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3065 (2006.01); H01L 21/02 (2006.01); H01J 9/12 (2006.01); H01J 1/32 (2006.01); C23C 16/27 (2006.01); C23C 16/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3065 (2013.01); H01J 1/32 (2013.01); H01J 9/125 (2013.01); H01L 21/02019 (2013.01); H01L 21/02043 (2013.01); H01L 21/02376 (2013.01); C23C 16/0245 (2013.01); C23C 16/0281 (2013.01); C23C 16/276 (2013.01);
Abstract
A method for creating an enhanced multipaction resistant diamond-like coating (DLC) coating with lower Secondary Electron Emission (SEE) properties is performed on an initial surface by etching a DLC coating deposited on the surface after deposition and optionally creating interlayers to enhance adhesion mechanical properties between the DLC coating and the initial surface.