The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Nov. 27, 2017
Hitachi High-tech Corporation, Tokyo, JP;
Katsura Takaguchi, Tokyo, JP;
Natsuki Tsuno, Tokyo, JP;
Masahiro Sasajima, Tokyo, JP;
Toshihide Agemura, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
A charged particle beam apparatus includes: an electromagnetic wave generation sourcethat generates an electromagnetic wave with which a sample is irradiated; a charged particle optical system that includes a pulsing mechanismand irradiates the sample with a focused charged particle beam; a detectorthat detects an emitted electron emitted by an interaction between the charged particle beam and the sample; a first irradiation control unitthat controls the electromagnetic wave generation source and irradiates the sample with a pulsed electromagnetic wave to generate an excited carrier; a second irradiation control unitthat controls the pulsing mechanism and irradiates an electromagnetic wave irradiation region of the sample with a pulsed charged particle beam; and a timing control unit. While the emitted electrons are detected by the detector in synchronization with irradiation of the pulsed charged particle beam, the timing control unit controls the first irradiation control unit and the second irradiation control unit, and controls an interval time between the pulsed electromagnetic wave and the pulsed charged particle beam to the electromagnetic wave irradiation region. As a result, based on a transient change in an electron emission amount, it is possible to detect sample information with nano spatial resolution.