The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Jun. 17, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Jerry Johannes Martinus Peijster, Maartendijk, NL;
Diederik Geert Femme Verbeek, Pijnacker, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); H01J 37/02 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70891 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03F 7/709 (2013.01); H01J 37/02 (2013.01); H01J 37/3177 (2013.01); H01J 2237/002 (2013.01); H01J 2237/0216 (2013.01); H01J 2237/28 (2013.01);
Abstract
Support arrangement for supporting a radiation projection system in a substrate processing apparatus, the support arrangement comprising: