The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Apr. 29, 2020
Afore Oy, Lieto, FI;
Bluefors Cryogenics Oy, Helsinki, FI;
Aki Junes, Turku, FI;
Ari Kuukkala, Turku, FI;
Timo Salminen, Turku, FI;
Vesa Henttonen, Turku, FI;
Matti Manninen, Espoo, FI;
David Gunnarsson, Helsinki, FI;
Leif Roschier, Vantaa, FI;
Afore Oy, Lieto, FI;
Bluefors Cryogenics Oy, Helsinki, FI;
Abstract
The present invention provides a testing device for electrically testing integrated circuits on a wafer. The testing device comprises a vacuum chamber, a chuck for holding the wafer, a probe card for electrically contacting the integrated circuits, means for moving the chuck relative to the probe card, a first radiation shield arranged inside the vacuum chamber and enclosing the chuck and the probe card, and a cooling unit thermally connected to the first radiation shield. The means for moving the chuck relative to the probe card comprises a supporting column having a first end and a second end, the first end of the supporting column being attached to the chuck, and the first radiation shield comprises a first fixed part having a first aperture through which the supporting column is arranged to pass, and a first movable part that is attached to the supporting column and arranged to cover the first aperture.